Gigaphoton Launches Its Latest KrF Light Source Model ‘G60K’

Gigaphoton Inc. (Head Office: Oyama, Tochigi; President and CEO: Katsumi Uranaka), a manufacturer of lightsources used in semiconductor lithography, has announced that it began shipping its new KrF light source model ‘G60K’ on October 29. A full model change for the first time in about 15 years and the introduction of a new power supply unit has made it possible for the new KrF light source model ‘G60K’ to output 60 W, which is 1.5 times greater than that of the previous model. By thi...